The chemical modification of semiconductor electrodes plays a key role in designing an efficient energy converter. For the light-induced hydrogen evolution reaction (HER) thin metal overlayers are important catalysts. Hence, a controlled deposition of the metal onto the semiconductor electrode is important to ensure optimal catalyzing of the HER. Photoelectrodeposition is investigated by cyclovoltammetry (CV) and atomic force microscopy (AFM). The variation of deposition parameters (e.g. time and/or overpotential) leads to different cluster densities and size distributions which affects the activity of the photocathode.