BI-STABLE DIAMOND RF MEMS SWITCH FOR HYBRID INTEGRATION
The aim of this work is to develop a bistable, electrothermally driven RF micro switch  for hybrid integration into a variety of substrates. It is based on a diamond-on-silicon technology and consists of two parts, namely a pre-stressed diamond micro bridge actuator in a silicon frame containing a signal contact in the centre and a base plate possessing a coplanar waveguide. The assembly of both parts is realized by soldering copper pads located on the actuator onto pads on the base plate , which e.g. can be a coplanar line on a low loss substrate. Intrinsic compressive stress in the diamond actuator, which is a double suspended beam, leads to a buckling into two possible stable states. Switching between these two positions is achieved by means of a thermally driven bimetallic pair consisting of diamond and nickel, which is placed on the actuator part. Fig. 1 shows a schematic view of the complete system.
The work includes design, simulation, fabrication and characterisation of the device.The following details are investigated:
- mechanical simulation
- fabrication technology
- hybrid integration
- transient behaviour
- RF performance
 J. Kusterer, F.J. Hernandez, S. Haroon, P. Schmid, A. Munding, R. Müller, E. Kohn, Diamond & Related Materials 15 (2006) 773.
 P. Benkart, A. Kaiser, A. Munding, M. Bschorr, H.-J. Pfleiderer, A. Heittmann, H. Huebner, U. Ramacher, E. Kohn, IEEE Design & Test of Computers, 22 (2005) 512.