Area
Base: 1050m2
Visitor passage: 310m2
Cleanroom: 570m2
- class 3(1): 50m2
- class 4(10): 50m2
- class 5(100): 470m2
Engergy
Electricity
- Common: 150kW
- Security supply: 500kW
- Uninterruptible power supply: 200kW
Long-distance refrigeration
Long-distance heating
Gases
Central supply
Compressed air
Vacuum
Nitrogen: Quality 6.0
Special gases: Ammonia, Argon, Arsine, Chlorine, Disilane, Laughing gas, Phosphine, Oxygen, Silane, Tetraflouromethane, Hydrogen
Nitrogen tank
- Liquid phase: 27000 litre
- Gas phase: 12000 litre
Ventilation
Outer air: 2 x 34000m3/h
Circulation air: 12 x 29000m3/h
Circulation air MBE: 1x 11000m3/h, 1 x 18000m3/h
Process ventilation: 2 x 26000m3/h
Smoke ventilation: 4 x 6000m3/h
Water supply
Drinking water
Pre demineralisation: 5µS/cm, 15m3/h
Demineralisation: 0,1µS/cm
Waste water neutralization: 25m3/h
Safety
Central fire alarm system
Sprinkler system
Intrusion system
Special gases
- SPS controlled and supervised
- Constant concentration control
- Double pipe installation