Laboratory - Semiconductor Technology

Study Programmes

Master Elektrotechnik und Informationstechnologie > Praxismodul
Master Informationssystemtechnik > Praxismodul
Master Communication and Information Technology > Practical Module


In this laboratory project, various manufacturing techniques of the microsystems technology are used to produce metal semiconductor field effect transistors (MESFETs) from GaAs. These are then electrically characterized. The process steps carried out in this practical course are also used in a similar way in the industrial production of semiconductor components, albeit in an automated form. This project therefore provides an insight into what happens between sending the designs to a manufacturer (tape-out) and the moment the finished chips are delivered.

The project takes place as a one-week block project during the semester break. The dates are planned via Moodle, so please register in the Moodle course if you are interested! In addition to the week in the cleanroom and laboratory, you will need to prepare carefully and write a detailed report. You can also find the instructions on the Moodle course page.

ENGB 70446

Responsible Lecturer

Prof. Dr.-Ing. habil. Dietmar Kissinger


Summer and Winter Semester

Link to Moodle

Language: English and/or German



SWS: 4