Service - Universität Ulm

Focused Ion Beam Center UUlm

The FIB Center UUlm has two high-resolution FEI dual beam microscopes:

Helios Nanolab 600 und Quanta FEG 3D

Both systems are equipped with an electron column and ion column arranged in a 52º angle; both focused beams have a coincident focus point in the eucentric plane. Hence, a maskless modification of specimens (gas-assisted etching, milling, deposition, etc.) with the ion beam can be simultaneously imaged, monitored or analyzed with the electron beam.

Since January 2025 the FIB Center is a part of the Core Facility EMMA of the Ulm University.

Helios Nanolab 600 (FEI / Thermo Fisher)

Quanta 3D FEG (FEI / Thermo Fisher)

Serviceleistungen

Further information about the microscopes and additional available methods like EDX and EBSD can be found on the Homepage of the CF EMMA.

If you are interested in measurements and/or you need a quote please contact us via email:

Dr. Luis Arizpe
Dr. Gregor Neusser

Image gallery

Ga source of a FIB Gun — SE image of Ga source of a FIB Gun

The image shows the secondary electron image of a cross section through three Li-Ni-Mn-oxide particle — SE image of Li-Ni-Mn-oxide particle (for further informations please see doi.org/10.1002/advs.202508174)

Pt-black modified microelectrode — SE image of a cross section through a recessed microelectrode modified with the Pt-black film (for further informations please see doi.org/10.1021/acs.analchem.3c03957)

3D reconstruction of Pt-black modified microelectrode — 3D reconstruction recessed microelectrode modified with the Pt-black film (blue), SixNy/SiO2 insulation layer marked in red and the gold layer in yellow (for further informations please see doi.org/10.1021/acs.analchem.3c03957)

SE image of Lentilactobacillus parabuchneri biofilm on wood — SE image of Lentilactobacillus parabuchneri biofilm on wood (for further informations please see doi.org/10.3390/foods12071503)

Lentilactobacillus parabuchneri biofilm on wood — SE image of Lentilactobacillus parabuchneri biofilm on wood (for further informations please see doi.org/10.3390/foods12071503)

FIB image of nickel‑cobalt alloys — FIB ion channelling image of electrochemically deposited nickel‑cobalt alloys (for further informations please see doi.org/10.1016/j.surfcoat.2023.129523)

PtC-embedded HC composite electrodes — SE images of a cross-section through PtC-embedded and OsO4 /UA stained HC composite electrodes (for further informations please see doi.org/10.1111/jmi.70014)

Porphyrin crystals embedded in silicone rubber — Cross section through porphyrin crystals from battery composite material embedded in silicone rubber (for further informations please see doi.org/10.1016/j.jpowsour.2022.231002)

3D reconstruction of porphyrin crystals — 3D reconstruction FIB/SEM tomography data set of porphyrin crystals from battery composite material (for further informations please see doi.org/10.1016/j.jpowsour.2022.231002)

PML nuclear bodies in HCMV infected cell — Part of a FIB/SEM tomography data set of promyelocytic leukaemia nuclear bodies within a with human cytomegalovirus infected cell (for further informations please see doi.org/10.7554/eLife.73006 )

GIT Labor-Fachzeitschrift (11/2012, S. 787)

Uni Ulm Intern (04/2011)