Technology for Micro- and Nanostructures / Micro- and Nanotechnologies

This course on the technology for micro- and nanostructures provides an advanced understanding of the technology for fabricating structures with micro- and nanometer-scale dimensions. At the beginning of the course, the basic technological processes for lithography and pattern transfer techniques are discussed. As applications of these technologies, fabrication processes are presented like CMOS and III-V technology, micromechanics, magnetic thin-film heads, flat-panel displays, micro optics, x-ray optics and quantum-effect electronic devices. The lectures are accompanied by exercises, where important original publications will be discussed.

Information for 'Advanced Materials' and 'Energy Science and Technology' students

We only have very few students in the 'Advanced Materials' and 'Energy Science and Technology' study programs and therefore, the lecture entitled 'Micro- and Nanotechnology' will be held together with the lecture 'Technology for Micro- and Nanostructures' (this is a lecture for 'Electrical Engineering' and 'Communications Technology' students). If you register for 'Micro- and Nanotechnology' on the moodle page, you will also automatically be registered as a participant of 'Technology for Micro- and Nanostructures' moodle course.


  • "Fundamentals of Microfabrication" 2nd edition by Marc J. Madou (CRC Press, Boca Raton 2002)
  • "Submicron- and nanometer-structures technology", 2nd edition by Henry I. Smith (NanoStructures Press, 437 Peakham Road, Sudbury, MA 01776, USA, 1994)
  • "Introduvtion to Microlithography" 2nd edition by L.F. Thompson, C.G. Willson, and M.J. Bowden (ACS Professional Reference Book, American Chemical Society, 1994)
  • "Mikrosystemtechnik für Ingenieure", by Wolfgang Menz und Jürgen Mohr (Wiley VCH, Weinheim 1997)
  • "Mikromechanik - Einführung in Technologie und Anwendungen" 2. Auflage by Stephanus Büttgenbach (Teubner Verlag, Stuttgart 1994)

Prof. Dr. Peter Unger




Lecture: 2h/week
Exercise: 1h/week


Oral exam by appointment

Course number

ENGFN 70458 (ET/CT)

ENGFN 70918 (AM/EST)

Moodle course page

Link will follow shortly before the winter term starts