Technology for Micro- Nanostructures - Micro- and Nanotechnologies

This course on the Technology for Micro- and Nanostructures provides an advanced understanding of the technology for fabricating structures with micron- and nanometer-scale dimensions. At the beginning of the course, the basic technological processes for lithography and pattern transfer techniques are discussed. As applications of these technologies, fabrication processes are presented like CMOS and III-V technology, micromechanics, magnetic thin-film heads, flat-panel displays, micro optics, x-ray optics and quantum-effect electronic devices. The lectures are accompanied by exercises, where important original publications will be discussed.

 Lecture Course Material and Schedule



  • "Fundamentals of Microfabrication" 2nd edition by Marc J. Madou (CRC Press, Boca Raton 2002)
  • "Submicron- and nanometer-structures technology", 2nd edition by Henry I. Smith (NanoStructures Press, 437 Peakham Road, Sudbury, MA 01776, USA, 1994)
  • "Introduvtion to Microlithography" 2nd edition by L.F. Thompson, C.G. Willson, and M.J. Bowden (ACS Professional Reference Book, American Chemical Society, 1994)
  • "Mikrosystemtechnik für Ingenieure", by Wolfgang Menz und Jürgen Mohr (Wiley VCH, Weinheim 1997)
  • "Mikromechanik - Einführung in Technologie und Anwendungen" 2. Auflage by Stephanus Büttgenbach (Teubner Verlag, Stuttgart 1994)


  • Peter Unger
  • Institut für Optoelektronik
  • Albert-Einstein-Allee 45
  • 89081 Ulm
  • Raum: 45.2.230
  • Telefon: (0731) 50-26054
  • Telefax: (0731) 50-26049

Dates, Locations


Thursday 08:15-10:00 (wöchentlich)
room 43.2.101


Thursday 16:00-18:00 (14-tägig)
room 43.2.104





Course Number

ENGF 7008