Focused Ion Beam Center UUlm

Das FIB Center UUlm verfügt über 2 hochauflösende FIB/SEM Systeme der Firma FEI:

Helios Nanolab 600 und Quanta FEG 3D

Diese höchstauflösenden Zweistrahl-Systeme kombinieren Ga+-Ionenstrahl- und Elektronenstrahlmikroskopie in einem Gerät, wobei die Ionensäule in einem Winkel von 52° zur Elektronensäule angebracht ist. Somit können durch den Ionenstrahl induzierte maskenlose Probenmodifikationen (z.B. lokalisiertes Ätzen, Abtragen, Aufbringen, etc.) im Nano-Maßstab simultan mittels Elektronenstrahlmikroskopie in Realzeit beobachtet, abgebildet oder analysiert werden.

Serviceleistungen

Falls Sie an unserem Service interessiert sind oder ein Angebot benötigen, kontaktieren Sie uns telefonisch oder per Email:

apl. Prof. Dr. Christine Kranz

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Projektformular
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Preise

Technische Spezifikationen

Ion optics (Sidewinder™ column)

Liquid Ga ion source
FIB Res. 5 nm (@ 30 kV)

Field emission SEM

SEM (Schottky field emitter)
Res. 0.9 nm @ 15 kV

Piezo-controlled stage

x,y: 150 mm, z: 10 mm
6 inch wafer holder

Detectors

CDEM, ETD, TLD

Beam Chemistry

Pt deposition
Insulator Enhanced etch, IEE (XeF2)
Selective Carbon Mill, SCE

Additional equipment

Omniprobe
Quorum Cryosystem
AutoTEM ™
Nanobuilder

Die Helios Nanolab 600 mit ElstarTM Feldemission-Säule und SidewinderTM Ionensäule ist zusätzlich mit einem Omniprobe Mikromanipulator zum Lift-out von FIB-präparierten TEM-Lamellen und einem Kryosystem mit Kryo-Probentransferkammer ausgestattet. Somit können, alternativ zum Brechen oder zur Mikrotomisierung, in situ Facetten einer Probe mit Hilfe des Ionenstrahles unter kryogenen Bedingungen gezielt präpariert werden. Die erzeugten Facetten können dann entweder direkt im FIB/SEM System mittels Elektronenstrahl charakterisiert oder mit Hilfe eines Mikromanipulators auf ein TEM-Gitter zur späteren Analyse transferiert werden.

Die Helios verfügt über das NanoBuilderTM Software Modul von FEI für schnelles Prototyping komplexer Strukturen basierend auf Elektronen- oder Ionenstrahl-induzierten Abscheidungsprozessen (EBID, IBID) oder gas-unterstützten Ätzprozessen.

Helios Nanolab 600 im FIB Center UUlm

Innenansicht des Mikroskops

Technische Spezifikationen

Ion optics Liquid Ga ion source FIB Res. 7 nm (@ 30 kV)		Field emission SEM SEM (Schottky field emitter)
Beam current 1.5 pA -65 nA in 15 steps		Three imaging modes: - high vacuum - low vacuum - Environmental SEM (ESEM™)
Stage x,y: 50 mm, z: 25 mm		High vacuum: 1.2 nm at 30 kV (SE) Low vacuum: 1.5 nm at 30 kV (SE) ESEM: 1.5 nm at 30 kV (SE)
Detectors ETD, GSED (ESEM Mode) EDX, EBSD		Beam Chemistry Pt, SiO2 deposition Insulator Enhanced etch (IEE) XeF2 Auto Slice and View™
Additional equipment EDX, EBSD (EDAX Ametek) Auto Slice and View™

Die Quanta 3D FEG ist neben 3 GIS für Platin, Isolatorabscheidung und Xenondifluorid für Ätzprozesse, mit einem SDD Apollo XV EDX Detektor der Firma EDAX ausgestattet für qualitative und quantitative chemische Analysen. Mittels DigiView 4 EBSD Detektor (EDAX) können kristalline Proben auf von Korn- und Gitterorientierungen untersucht werden.
Im environmental Modus (ESEM) können SEM Untersuchungen bei geringem Vakuum (d.h. höherem Druck) durchgeführt werden, was Messungen an wasserhaltigen bzw. nicht-leitenden Proben ermöglicht. ESEM kann auch in Kombination mit EDX oder EBSD durchgeführt werden.

Quanta 3D FEG im FIB Center UUlm

2020

A. Brandt, K. Keesa, K. Leopold Characterization of various metal nanoparticles by graphite furnace atomic absorption spectrometry: possibilities and limitations with regard to size and shape J. Anal. At. Spectrom. 35 2536-2544 (2020) doi.org/10.1039/D0JA00279H
R. Stach, T. Barone, E. Cauda, P. Krebs, B. Pejcic, S. Daboss, B. Mizaikoff Direct infrared spectroscopy for the size-independent identification and quantification of respirable particles relative mass in mine dustsAnalytical and Bioanalytical Chemistry 412, 3499–3508 (2020) DOI: doi.org/10.1007/s00216-020-02565-0
S. Daboss, J. Lin, M. Godejohann, C. Kranz Redox Switchable Polydopamine-Modified AFM-SECM Probes: A Probe for Electrochemical Force Spectroscopy Analytical Chemistry, 92, 8404−8413 (2020)
DOI: doi.org/10.1021/acs.analchem.0c00995
A. Hellmann, S. Daboss, F. Zink, C. Hartmann, P. Radermacher, C. Kranz, “Electrocatalytically modified microelectrodes for the detection of hydrogen peroxide at blood cells from swine with induced trauma”, Electrochimica Acta, 353, 136458 (2020). doi: 10.1016/j.electacta.2020.136458
J. Haas, R. Stach, C. Kolm, R. Krska, B. Mizaikoff Gallium arsenide waveguides as a platform for direct mid-infrared vibrational spectroscopy Analytical and Bioanalytical Chemistry, (2020) DOI: 10.1007/s00216-020-02546-3

2019

M. Schlathauer, J. Friedland, M. Linden, K. Leopold, Sustainable and reagent-free mercury trace determination in natural waters using nanogold dipsticks Microchemical Journal, 147, 253-262 (2019) DOI: 10.1016/j.microc.2019.03.032
J. Haas, P. Artmann, B. Mizaikoff Mid-infrared GaAs/AlGaAs micro-ring resonators characterized via thermal tuning RSC Advances, 9, 8594-8599 (2019) DOI: 10.1039/c8ra10395j
H. Wagdy, M. Dinc, B. Mizaikoff Synthesis of surface imprinted core-shell nanospheres for the selective determination of asparaginase Analytical Methods 11(31), 4034-4043 (2019) DOI: 10.1039/c9ay00634f
M. Gast, H. Sobek, B. Mizaikoff, Selective virus capture via hexon imprinting Materials Science & Engineering, C: Materials for Biological Applications 99, 1099-1104 (2019) DOI: 10.1016/j.msec.2019.02.037
A. Mutschler, V. Stock, L. Ebert, E. M. Bjoerk, K. Leopold, M. Linden, Mesoporous silica-gold films for straightforward, highly reproducible monitoring of mercury traces in water Nanomaterials, 9, 35/1-35/14 (2019) DOI: 10.3390/nano901003
J. Lin, S. Daboss, D. Blaimer, C. Kranz, Micro-Structured Polydopamine Films via Pulsed Electrochemical Deposition Nanomaterials, 9, 242/1-242/12 (2019) DOI: 10.3390/nano9020242
S. Daboss, P. Knittel, C. E. Nebel, C. Kranz Multifunctional Boron-Doped Diamond Colloidal AFM Probes Small, 15(48), 1902099 (2019) DOI: 10.1002/smll.201902099
L. Kaack, C. M. Altaner, C. Carmesin, A. Diaz, M. Holler, C. Kranz, G. Neusser, M. Odstrcil , H. J. Schenk, V. Schmidt, M. Weber, Y. Zhang, S. Jansen Function and three-dimensional structure of intervessel pit membranes in angiosperms: a review IAWA journal / International Association of Wood Anatomists 40(4), 673-702(2019) DOI: 10.1016/22941932-40190259

2018

M. Gast, S. Kuehner, H. Sobek, P. Walther, B. Mizaikoff Enhanced Selectivity by Passivation: Molecular Imprints for Viruses with Exceptional Binding Properties Analytical Chemistry, 90, 5576-5585 (2018) DOI: 10.1021/acs.analchem.7b05148
J. Haas, E. V. Catalan, P. Piron, F. Nikolajeff, L. Oesterlund, M. Karlsson, B. Mizaikoff Polycrystalline Diamond Thin-Film Waveguides for Mid-Infrared Evanescent Field Sensors ACS Omega, 3, 6190-6198 (2018) DOI: 10.1021/acsomega.8b00623
J. Haas, M. Schwartz, U. Rengstl, M. Jetter, P. Michler, B. Mizaikoff Chem/bio sensing with non-classical light and integrated photonics Analyst, 143, 593-605 (2018) DOI: 10.1039/c7an01011g
J. Haas, E.V. Catalan, P. Piron, M. Karlsson, B. Mizaikoff Infrared spectroscopy based on broadly tunable quantum cascade lasers and polycrystalline diamond waveguides Analyst, 143, 5112-5119 (2018) DOI: 10.1039/c8an00919h
A. Holzinger, G. Neusser, B. J. J. Austen, A. Gamero-Quijano, G. Herzog, D. M. W. Arrigan, A. Ziegler, P. Walther, C. Kranz Investigation of modified Nanopore Arrays by FIB/SEM Tomography Faraday Discussions, 210 (Electrochemistry at nano-Interfaces), 113-130 (2018) DOI: 10.1039/c8fd00019k
N. Schauer, M. Dinc, B. Raabe, T. Hummel, M. Mueller, H. Sobek, B. Mizaikoff Selective binding of matrix metalloproteases MMP-9 and MMP-12 to inhibitor-assisted thermolysin-imprinted beads RSC Advances, 8, 32387-32394 (2018) DOI: 10.1039/c8ra04444a
R. S. Fernandes, M. Dinc, I. M. Raimundo Jr., B. Mizaikoff Synthesis and characterization of porous surface molecularly imprinted silica microsphere for selective extraction of ascorbic acid Microporous and Mesoporous Materials, 264, 28-34 (2018) DOI: 10.1016/j.micromeso.2017.07.019
M. Dinc, H. Basan, T. Hummel, M. Mueller, H. Sobek, I. Rapp, T. Diemant, R. J. Behm, M. Linden, B. Mizaikoff Selective Binding of Inhibitor-Assisted Surface-Imprinted Core/Shell Microbeads in protein Mixtures ChemistrySelect, 3, 4277-4282 (2018) DOI: 10.1002/slct.201800129
J. P. Guin, M. Dinc, B. Mizaikoff Selective Navigation of Bisphenol-A from Water to a Polarity Tuned Porous Molecularly Imprinted Polymer ChemistrySelect, 3, 12223-12233 (2018) DOI: 10.1002/slct.201802691

2017

O. Bibikova, J. Haas, Á.I. López-Lorente, A. Popov, M. Kinnunen, Y. Ryabchikov, A. Kabashin, I. Meglinski, B. Mizaikoff Surface enhanced infrared absorption spectroscopy based on gold nanostars and spherical nanoparticles Analytica Chimica Acta, 990, 141-149 (2017) DOI: 10.1016/j.aca.2017.07.045
J. Izquierdo, A. Eifert, C. Kranz, R.M. Souto In situ investigation of copper corrosion in acidic chloride solution using atomic force − scanning electrochemical microscopy Electrochimica Acta, 247, 588–599 (2017) DOI: 10.1016/j.electacta.2017.07.042
P. Knittel, N. Hibst, B. Mizaikoff, S. Strehle, C. Kranz Focused ion beam-assisted fabrication of soft high-aspect ratio silicon nanowire atomic force microscopy probes Ultramicroscopy, 179, 24–32 (2017) DOI: 10.1016/j.ultramic.2017.03.031
S.K. Guin, P. Knittel, S. Daboss, A. Breusow, C. Kranz Template- and additive-free electrosynthesis and characterization of spherical gold nanoparticles on hydrophobic conducting polydimethylsiloxane Chemistry - An Asian Journal, 12(13), 1615–1624 (2017) DOI: 10.1002/asia.201700444
O. Bibikova, J. Haas, A.I. Lopez-Lorente, A. Popov, M. Kinnunen, I. Meglinski, B. Mizaikoff Towards enhanced optical sensor performance: SEIRA and SERS with plasmonic nanostars The Analyst, 142(6), 951–958 (2017) DOI: 10.1039/c6an02596j
R. Fernandes, M. Dinc, I. Raimundo Jr., B. Mizaikoff Molecularly imprinted core-shell hybrid microspheres for the selective extraction of vanillin Analytical Methods, 9, 2883–2889 (2017) DOI: 10.1039/C7AY00461C
C. Ziller, J. Lin, P. Knittel, L. Friedrich, C. Andronescu, S. Pöller, W. Schuhamnn, C. Kranz Poly(benzoxazine) as immobilization matrix for miniaturized ATP and glucose biosensors ChemElectroChem, 4(4), 864–871 (2017) DOI: 10.1002/celc.201600765
Á.I. López-Lorente, P. Wang, B. Mizaikoff Towards label-free mid-infrared protein assays: In-situ formation of bare gold nanoparticles for surface enhanced infrared absorption spectroscopy of bovine serum albumin Microchimica Acta, 184(2), 453–462 (2017) DOI: 10.1007/s00604-016-2031-0
M. Liesegang, R. Milke, C. Kranz, G. Neusser Silica nanoparticle aggregation in calcite replacement reactions Scientific Reports, 7, 14550 (2017) DOI: 10.1038/s41598-017-06458-8
G. Neusser, S. Eppler, J.L. Bowen, C.J. Allender, P. Walther, B. Mizaikoff, C. Kranz FIB and MIP: Understanding Nanoscale Porosity in Molecularly Imprinted Polymers via 3D FIB/SEM Tomography Nanoscale, 9, 14327-14334 (2017) DOI: 10.1039/C7NR05725C

2016

M. Hocker, P. Maier, L. Jerg, I. Tischer, G. Neusser, C. Kranz, M. Pristovsek, C.J. Humphreys, R.A. Leute, D. Heinz, O. Rettig, F. Scholz, K. Thonke Determination of axial and lateral exciton diffusion length in GaN by electron energy dependent cathodoluminescence Journal of Applied Physics, 120, 085703/1–085703/6 (2016) DOI: 10.1063/1.4961417
J. Izquierdo, B.M. Fernández-Pérez, A. Eifert, R.M. Souto, C. Kranz Simultaneous Atomic Force - Scanning Electrochemical Microscopy (AFM-SECM) Imaging of Copper dissolution Electrochimica Acta, 201, 320–332 (2016) DOI: 10.1016/j.electacta.2015.12.160
C.M. Frey, A. Eifert, H. Schütz, H. Barth, B. Mizaikoff, C. Kranz Macroscopic and Microscopic electrochemical investigation of Clostridium botulinum C2IIa embedded in supported lipid membranes Electrochimica Acta, 209, 341–349 (2016) DOI: 10.1016/j.electacta.2016.05.055
M. Sieger, B. Mizaikoff Toward On-Chip Mid-Infrared Sensors Analytical Chemistry, 88 (11), 5562–5573 (2016) DOI: 10.1021/acs.analchem.5b04143
Y. Liu, A. Holzinger, P. Knittel, L. Poltorak, A. Gamero-Quijano, W.D.A. Rickard, A. Walcarius, G. Herzog, C. Kranz, D.W.M. Arrigan Visualization of Diffusion within Nanoarrays Analytical Chemistry, 88 (13), 6689–6695 (2016) DOI: 10.1021/acs.analchem.6b00513
P. Knittel, B. Mizaikoff, C. Kranz Simultaneous Nanomechanical and Electrochemical Mapping: Combining Peak Force Tapping Atomic Force Microscopy with Scanning Electrochemical Microscopy Analytical Chemistry, 88 (12), 6174–6178 (2016) DOI: 10.1021/acs.analchem.6b01086
A. Pochert, S. Ziller, S. Kapetanovic, G. Neusser, C. Kranz, M. Lindén Intermediate Pickering emulsion formation as a means for synthesizing hollow mesoporous silica nanoparticles New Journal of Chemistry, 40 (5), 4217–4222 (2016) DOI: 10.1039/C5NJ02855H
P. Knittel, H. Zhang, C. Kranz, G.G. Wallace, M.J. Higgins Probing the PEDOT:PSS/Cell Interface with Conductive Colloidal Probe AFM-SECM Nanoscale, 8, 4475–4481 (2016) DOI: 10.1039/C5NR07155K
P. Knittel, O. Bibikova, C. Kranz Challenges in nanoelectrochemical and nanomechanical studies of individual anisotropic gold nanoparticles Faraday Discussions, 193, 353–369 (2016) DOI: 10.1039/C6FD00128A
N. Hibst, P. Knittel, J. Biskupek, C. Kranz, B. Mizaikoff, S. Strehle The mechanisms of platinum-catalyzed silicon nano-wire growth Semiconductor Science and Technology, 31 (2), 025005 (2016) DOI: 10.1088/0268-1242/31/2/025005
E.N. Ndunda, B. Mizaikoff Synthesis of stationary phases that provide group recognition for polychlorinated biphenyls by porogenic fragment template imprinting Journal of Separation Science, 39 (5), 939–346 (2016) DOI: 10.1002/jssc.201500960

2011-2015

A. Pochert, D. Schneider, J. Haase, M. Linden, and R. Valiullin Diffusion and Molecular Exchange in Hollow Core–Shell Silica Nanoparticles Langmuir, 31, 37, 10285–10295 (2015) DOI: 10.1021/acs.langmuir.5b02367
E.N. Ndunda, V.O. Madadi, B. Mizaikoff An alternative clean-up column for the determination of polychlorinated biphenyls in solid matrices Environmental Science: Processes Impacts, 17 (12), 2101–2109 (2015) DOI: 10.1039/C5EM00409H
E.N. Ndunda, B. Mizaikoff Multi-walled carbon nanotubes: innovative sorbents for pre-concentration of polychlorinated biphenyls in aqueous environments Analytical Methods, 7 (19), 8034–8040 (2015) DOI: 10.1039/C5AY01496D
C. Villinger, G. Neusser, C. Kranz, P. Walther, T. Mertens 3D Analysis of HCMV Induced Nuclear Membrane Structures by FIB/SEM Tomography: Insight into an Unprecedented Membrane Morphology Viruses, 7 (11), 5686–5704 (2015) DOI: 10.3390/v7112900
I. Tischer, M. Hocker, B. Neuschl, M. Madel, M. Feneberg, M. Schirra, M. Frey, M. Knab, P. Maier, T. Wunderer, R. A.R. Leute, J. Wang, F. Scholz, J. Biskupek, J. Bernhard, U. Kaiser, U. Simon, L. Dieterle, H. Groiss, E. Müller, D. Gerthsen and K. Thonke Optical properties of defects in nitride semiconductors. Journal of Materials Research, 30(20), 2977-2990. (2015)DOI: doi.org/10.1557/jmr.2015.273
T. Conte Granado, G. Neusser, C. Kranz, J. Batista Destro Filho, V. Carabelli, E. Carbone, A. Pasquarelli, Progress in transparent diamond microelectrode arrays, Physica Status Solidi (A) Applications and Materials in press, 2015; DOI:10.1002/pssa.201532168
Y. Liu, M. Sairi, G. Neusser, C. Kranz, D. W. M. Arrigan, Achievement of Diffusional Independence at Nanoscale Liquid–Liquid Interfaces within Arrays, Analytical Chemistry, 87, 5486–5490 (2015), DOI: 10.1021/acs.analchem.5b01602
M. Madel, G. Neusser, U. Simon, B. Mizaikoff, K. Thonke, c-plane ZnO on a-plane sapphire: Inclusion of (1101) domains, Journal of Crystal Growth, 419, 128-132 (2015)
M. Sairi, N. Chen-Tan, G. Neusser, C. Kranz, Damien W. M. Arrigan, "Electrochemical Characterisation of Nanoscale Liquid|Liquid Interfaces Located at Focused Ion Beam-Milled Silicon Nitride Membranes", ChemElectroChem, 2, 98-105 (2015)
A. Eifert, B. Mizaikoff, C. Kranz, "Advanced fabrication process for combined atomic force-scanning electrochemical microscopy (AFM-SECM) probes", Micron, 68, 27-35 (2015).
B. Riedmüller, F. Huber, U. Herr "Towards sub-200 nm nano-structuring of linear giant magneto-resistivespin valves by a direct focused ion beam milling process" Journal of Applied Physics, 115, 064307 (2014) DOI: 10.1063/1.4865736
N. Hibst, P. Knittel, C. Kranz, B. Mizaikoff, S. Strehle, “Beam-Deposited Platinum as Versatile Catalyst for Bottom-Up Silicon Nanowire Synthesis”, Applied Physics Letters, 105, 153110, (2014).
L. J. Rogers, K. D. Jahnke, T. Teraji, L. Marseglia, C. Mueller, B. Naydenov, H. Schauffert, C. Kranz, J. Isoya, L. P. McGuinness, F. Jelezko, "Multiple identical single photon emitters in diamond", Nature Communication , 5, (2014), DOI: 10.1038/ncomms5739.
L. L. Kegel, S.-S. Kim, B. Mizaikoff, C. Kranz, K. S. Booksh, "Position Dependent Plasmonic Interaction Between a Single Nanoparticle and a Nanohole Array", Plasmonics, 9, 1229–1237 (2014).
A. Eifert, P. Langenwalther, J. Higl, M. Linden, C. E. Nebel, B. Mizaikoff, C. Kranz, "Focused ion beam (FIB)-induced changes in the electrochemical behavior of boron-doped diamond electrodes", Electrochimica Acta, 130, 418-425 (2014).
P. Knittel, M. J. Higgins, C. Kranz", Nanoscopic polypyrrole AFM-SECM probes enabling force measurements under potential control", Nanoscale, 6 2255- 2260 (2014).
C. Villinger, M. Schauflinger, H. Gregorius, C. Kranz, K. Höhn, S. Nafeey, P. Walther, Three-Dimensional Imaging of Adherent Cells using 2FIB/SEM and STEM, in Electron Microscopy: Methods and Protocols, Methods in Molecular Biology John Kuo (ed.), Vol. 1117, 617-638 (2014).
I. Tischer, M. Frey, M. Hocker, L. Jerg, M. Madel, B. Neuschl, K. Thonke, R. Leute, F. Scholz, H. Groiss, E. Müller and D. Gerthsen "Basal plane stacking faults in semipolar AlGaN: Hints to Al redistribution" Phys. Status Solidi B, 251: 2321-2325. (2014) DOI: 10.1002/pssb.201451252
J. M. Dake & C. E. Krill "Abnormal Grain Growth in Nanocrystalline Materials" Materials Science Forum, 753, 317–320. (2013) doi.org/10.4028/www.scientific.net/msf.753.317
T. Schädle, A. Eifert, C. Kranz, Y. Raichlin, A. Katzir, B. Mizaikoff, "Mid-Infrared Planar Silver Halide Waveguides with Integrated Grating Couplers", Applied Spectroscopy, 67, 1057-1063 (2013).
B. Riedmüller and U. Herr, "Nano-Patterning of GMR Spin Valves by FIB Technique" IEEE Transactions on Magnetics, vol. 48, no. 11, pp. 3662-3665, Nov. 2012 DOI: 10.1109/TMAG.2012.2203296
U. Herr, B. Riedmueller, M. Haddad, K. AbuShgair, M. Madel, J.B. Jakob and K. Thonke, "Investigation of Si nanowires from VLS growth" Phys. Status Solidi C, 9: 1912-1915. (2012) DOI: 10.1002/pssc.201200237
C. Villinger, H. Gregorius, C. Kranz, K. Höhn, C. Münzberg, G. von Wichert, B. Mizaikoff, G. Wanner, P.Walther, "FIB/SEM-tomography with TEM-like resolution for 3D imaging of high pressure frozen cells", Histochem. Cell Biol., 138, 549-556 (2012).
A. Eifert, W. Smirnov, S. Frittmann, C. Nebel, B. Mizaikoff, C. Kranz, "Atomic force microscopy probes with integrated boron doped diamond electrodes: Fabrication and application", Electrochem. Commun., 25, 30-34 (2012).
W. Smirnov, A. Kriele, R. Hoffmann, E. Sillero, J. Hees, O. A. Williams, N. Yang, C. Kranz, C. E. Nebel, "Diamond-Modified AFM Probes: From Diamond Nanowires to Atomic Force Microscopy-Integrated Boron-Doped Diamond Electrodes“, Anal. Chem., 83(12), 4936-4941 (2011).