Learning Goals

    The lecture covered the following aspects of scanning electron microscopy (SEM):

    • Basic operating principles of an SEM
    • General information on SEM hardware
    • Understanding/acquiring SEM images
    • Showcasing some SEM applications
    • Basic introduction to focused ion beam (FIB) microscopy

    Special emphasis was put on:

    • electron-specimen interaction
    • difference between various electron detectors

    Lecture Slides