Lecture "Thin Films"


  • Outline
  • Vacuum Science and Technology
    • Kinetic gas theory, application
    • Vacuum pumps and measurement techniques
  • Thin film growth techniques
    • Evaporation
    • Sputtering
    • CVD
  • Nucleation and growth of thin films
    • Thermodynamics and kinetics of nucleation and growth
    • Epitaxial lattice mismit and defects
    • Morphology of film growth
    • Grain growth, texture, microstructure control
    • Amorphous thin films
  • Mechanical properties of thin films
    • Internal stresses : origin and analysis
    • Mechanical relaxation effects
  • Magnetic properties of thin films
    • Micromagnetism
    • Magnetic structures in thin films
  • Applications
    • Magnetic recording media
    • Magnetoelectronics


  • Materials Science of Thin Films, M. Ohring, Academic Press, 2002
  • Nanoelectronics and Information Technology, R. Waser (ed.), Wiley VCH, 2003
  • The Materials Science of Semiconductors, A. Rockett, Springer, 2008 (see Springer ebook library of KIZ)
  • Heinrich and Bland, Ultrathin Magnetic Structures 4 - Applications of Nanomagnetism, Springer, 2005 (see Springer ebook library of KIZ)


Lecture materials will be availble through the moodle system for registered participants. The password will be given during the lecture.

Exercises /Lab

There will be both problem solving exercises and practical labs offered.

The labs will focus on thin film preparation, analysis and property measurements (thin film sputtering, XPS and XRR analysis, MOKE, GMR sensor lab). Lab groups/dates of experiment will be organized via moodle. Participation is voluntary.


Lab nametutordate and time
Thin film deposition: sputteringFlorian OstermaierTue 29.1.2019 10-12
X-ray Reflectometryt.b.a.
X-ray Photoemission Spectroscopyt.b.a.
Mechanical StressMarkus MohrTue 15.1.2019 10-12
MOKE Magnetometert.b.a.
GMR Sensorst.b.a.



Final Examination

Form: oral examination by appointment with Prof. Herr. 


Prof. U. Herr

Time and location

Tuesday 12-14 in 45.2.102 (exercises)

Wednesday 10-12 in 47.2.101 (lectures)

lab:  organized via moodle


DateTue 12-14Wed 10-12
30.10.18lecture 1
6.11.18lecture 2
13.11.18exercise 1
14.11.18lecture 3
21.11.18lecture 4
28.11.18lecture 5
4.12.18exercise 2
5.12.18lecture 6
12.12.18lecture 7
19.12.18lecture 8
9.1.19lecture 9
16.1.19lecture 10
22.1.19exercise 3
23.1.19lecture 11
30.1.19lecture 12
6.2.19lecture 13
13.2.19lecture 14